Tensile strain mapping in flat germanium membranes

  • S. D. Rhead
  • , V. A. Shah
  • , J. E. Halpin
  • , M. Myronov
  • , D. H. Patchett
  • , P. S. Allred
  • , V. Kachkanov
  • , I. P. Dolbnya
  • , N. R. Wilson
  • , D. R. Leadley

科研成果

摘要

The membranes have the potential to be excellent growth and integration platforms: compared to bulk Ge epitaxially grown on Si (001) they are perfectly flat and XRD and PV-TEM confirm the misfit dislocation network has been removed. The strain profile across the membrane is symmetrical and the membrane is slightly more tensile strained than the bulk material. The difference in strain across the membrane is too small to create a large variation in optical device performance across the entire membrane. Coupled with the smoother surface and absence of misfit dislocation network compared to the bulk material, the membranes are both excellent strain tuning platforms for optical applications and, more generally, for growth of subsequent active layers.

源语言English
主期刊名2014 7th International Silicon-Germanium Technology and Device Meeting, ISTDM 2014
出版商IEEE Computer Society
43-44
页数2
ISBN(印刷版)9781479954285
DOI
出版状态Published - 1 6月 2014
活动7th International Silicon-Germanium Technology and Device Meeting, ISTDM 2014 - Singapore
期限: 2 6月 20144 6月 2014

出版系列

姓名2014 7th International Silicon-Germanium Technology and Device Meeting, ISTDM 2014

Conference

Conference7th International Silicon-Germanium Technology and Device Meeting, ISTDM 2014
国家/地区Singapore
Singapore
时期2/06/144/06/14

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