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Stress of homogeneous and graded epitaxial thin films studied by full-shape analysis of high resolution reciprocal space maps

  • Tatjana Ulyanenkova
  • , Andrei Benediktovitch
  • , Maksym Myronov
  • , John Halpin
  • , Stephen Rhead
  • , Alex Ulyanenkov

科研成果: Conference contribution

1 引用 (Scopus)

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Engineering

Material Science