Tensile strain mapping in flat germanium membranes

  • S. D. Rhead
  • , V. A. Shah
  • , J. E. Halpin
  • , M. Myronov
  • , D. H. Patchett
  • , P. S. Allred
  • , V. Kachkanov
  • , I. P. Dolbnya
  • , N. R. Wilson
  • , D. R. Leadley

Producción científica

Resumen

The membranes have the potential to be excellent growth and integration platforms: compared to bulk Ge epitaxially grown on Si (001) they are perfectly flat and XRD and PV-TEM confirm the misfit dislocation network has been removed. The strain profile across the membrane is symmetrical and the membrane is slightly more tensile strained than the bulk material. The difference in strain across the membrane is too small to create a large variation in optical device performance across the entire membrane. Coupled with the smoother surface and absence of misfit dislocation network compared to the bulk material, the membranes are both excellent strain tuning platforms for optical applications and, more generally, for growth of subsequent active layers.

Idioma originalEnglish
Título de la publicación alojada2014 7th International Silicon-Germanium Technology and Device Meeting, ISTDM 2014
EditorialIEEE Computer Society
Páginas43-44
Número de páginas2
ISBN (versión impresa)9781479954285
DOI
EstadoPublished - 1 jun 2014
Evento7th International Silicon-Germanium Technology and Device Meeting, ISTDM 2014 - Singapore
Duración: 2 jun 20144 jun 2014

Serie de la publicación

Nombre2014 7th International Silicon-Germanium Technology and Device Meeting, ISTDM 2014

Conference

Conference7th International Silicon-Germanium Technology and Device Meeting, ISTDM 2014
País/TerritorioSingapore
CiudadSingapore
Período2/06/144/06/14

Huella

Profundice en los temas de investigación de 'Tensile strain mapping in flat germanium membranes'. En conjunto forman una huella única.

Citar esto