Tensile strain mapping in flat germanium membranes

S. D. Rhead, V. A. Shah, J. E. Halpin, M. Myronov, D. H. Patchett, P. S. Allred, V. Kachkanov, I. P. Dolbnya, N. R. Wilson, D. R. Leadley

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Abstract

The membranes have the potential to be excellent growth and integration platforms: compared to bulk Ge epitaxially grown on Si (001) they are perfectly flat and XRD and PV-TEM confirm the misfit dislocation network has been removed. The strain profile across the membrane is symmetrical and the membrane is slightly more tensile strained than the bulk material. The difference in strain across the membrane is too small to create a large variation in optical device performance across the entire membrane. Coupled with the smoother surface and absence of misfit dislocation network compared to the bulk material, the membranes are both excellent strain tuning platforms for optical applications and, more generally, for growth of subsequent active layers.

Original languageEnglish
Title of host publication2014 7th International Silicon-Germanium Technology and Device Meeting, ISTDM 2014
PublisherIEEE Computer Society
Pages43-44
Number of pages2
ISBN (Print)9781479954285
DOIs
Publication statusPublished - 1 Jun 2014
Event7th International Silicon-Germanium Technology and Device Meeting, ISTDM 2014 - Singapore, Singapore
Duration: 2 Jun 20144 Jun 2014

Publication series

Name2014 7th International Silicon-Germanium Technology and Device Meeting, ISTDM 2014

Conference

Conference7th International Silicon-Germanium Technology and Device Meeting, ISTDM 2014
Country/TerritorySingapore
CitySingapore
Period2/06/144/06/14

Keywords

  • Silicon
  • Substrates
  • Epitaxial growth
  • Lattices
  • Tensile Strain

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