Stress of homogeneous and graded epitaxial thin films studied by full-shape analysis of high resolution reciprocal space maps

Tatjana Ulyanenkova, Andrei Benediktovitch, Maksym Myronov, John Halpin, Stephen Rhead, Alex Ulyanenkov

Research output: Chapter in Book/Report/Conference proceedingConference contribution

1 Citation (Scopus)

Abstract

The Bragg peak position of a homogeneous solid solution epitaxial film is directly related to the solid solution concentration, film strain and, consequently, residual stress. The peak shape contains information about defects present in the sample. In the case of compositionally graded epitaxial films the situation is more complex since instead of a single Bragg peak there is a continuous diffracted intensity distribution which can be measured by means of recording high resolution reciprocal space maps. We analyse the thin film residual stress based not only on peak positions, but taking into account the defect-induced peak shape as well. Consideration of the peak shape enables the determination of the stress depth profile in the case of graded films and to improves the accuracy in the case of homogeneous films.

Original languageEnglish
Title of host publicationInternational Conference on Residual Stresses 9 (ICRS 9)
PublisherTrans Tech Publications Ltd
Pages249-256
Number of pages8
ISBN (Print)9783037858493
DOIs
Publication statusE-pub ahead of print - 1 Sept 2013
Event9th International Conference on Residual Stresses, ICRS 2012 - Garmisch-Partenkirchen, Germany
Duration: 7 Oct 20129 Oct 2012

Publication series

NameMaterials Science Forum
Volume768-769
ISSN (Print)0255-5476
ISSN (Electronic)1662-9752

Conference

Conference9th International Conference on Residual Stresses, ICRS 2012
Country/TerritoryGermany
CityGarmisch-Partenkirchen
Period7/10/129/10/12

Keywords

  • High resolution X-ray diffraction
  • Misfit dislocations
  • Reciprocal space mapping
  • Stress and composition depth profiles
  • Stress and composition value

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