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Tensile strain mapping in flat germanium membranes

  • S. D. Rhead
  • , V. A. Shah
  • , J. E. Halpin
  • , M. Myronov
  • , D. H. Patchett
  • , P. S. Allred
  • , V. Kachkanov
  • , I. P. Dolbnya
  • , N. R. Wilson
  • , D. R. Leadley

Publikation: Conference contribution

Abstract

The membranes have the potential to be excellent growth and integration platforms: compared to bulk Ge epitaxially grown on Si (001) they are perfectly flat and XRD and PV-TEM confirm the misfit dislocation network has been removed. The strain profile across the membrane is symmetrical and the membrane is slightly more tensile strained than the bulk material. The difference in strain across the membrane is too small to create a large variation in optical device performance across the entire membrane. Coupled with the smoother surface and absence of misfit dislocation network compared to the bulk material, the membranes are both excellent strain tuning platforms for optical applications and, more generally, for growth of subsequent active layers.

OriginalspracheEnglish
Titel2014 7th International Silicon-Germanium Technology and Device Meeting, ISTDM 2014
Herausgeber (Verlag)IEEE Computer Society
Seiten43-44
Seitenumfang2
ISBN (Print)9781479954285
DOIs
PublikationsstatusPublished - 1 Juni 2014
Veranstaltung7th International Silicon-Germanium Technology and Device Meeting, ISTDM 2014 - Singapore, Singapore
Dauer: 2 Juni 20144 Juni 2014

Publikationsreihe

Name2014 7th International Silicon-Germanium Technology and Device Meeting, ISTDM 2014

Conference

Conference7th International Silicon-Germanium Technology and Device Meeting, ISTDM 2014
Land/GebietSingapore
OrtSingapore
Zeitraum2/06/144/06/14

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